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Cited 6 time in webofscience Cited 5 time in scopus
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Patterning of an amine-terminated nanolayer by extreme ultraviolet

Title
Patterning of an amine-terminated nanolayer by extreme ultraviolet
Authors
Moon, SChung, SJeon, CPark, CYHwang, HNHwang, CCSong, HShin, HJ
POSTECH Authors
Chung, S
Date Issued
Jan-2007
Publisher
AMER INST PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/9575
DOI
10.1063/1.2803216
ISSN
0003-6951
Article Type
Article
Citation
APPLIED PHYSICS LETTERS, vol. 91, no. 19, 2007-01
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