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BAEK, ROCK HYUN(백록현)
scopus
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Dept of Electrical Engineering(전자전기공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2020
1
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Article
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Subject
BULK FINFETS
1
Contact/open critical dimension (...
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DC/AC
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fin
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nanosheet
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parasitics
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RC delay
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sub-5-nm node
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SCIE
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: nanosheet
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: Contact/open critical dimension (CCD/OCD)
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: nanosheet
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: sub-5-nm node
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: sub-5-nm node
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Article
Sensitivity of Source/Drain Critical Dimension Variations for Sub-5-nm Node Fin and Nanosheet FETs
SCIE
SCOPUS
IEEE TRANSACTIONS ON ELECTRON DEVICES, vol. 67, no. 1, page. 258 - 262, 2020-01
BAEK, ROCK HYUN
;
YOON, JUN SIK
;
JEONG, JINSU
;
SEUNGHWAN, LEE
1
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