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SIMOX SOI 제조시 산소이온 주입량의 감소가능성
- Title
- SIMOX SOI 제조시 산소이온 주입량의 감소가능성
- Authors
- 김범만
- Date Issued
- 1993-01-01
- Article Type
- Conference
- Citation
- 반도체 부품 합동학술발표회, page. 165-168, 1993-01-01
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Related Researcher
- 김범만KIM, BUM MAN
- Dept of Electrical Enginrg