Full metadata record
DC Field | Value | Language |
dc.contributor.author | 김범만 | - |
dc.date.accessioned | 2018-06-22T01:03:26Z | - |
dc.date.available | 2018-06-22T01:03:26Z | - |
dc.date.created | 2009-03-27 | - |
dc.date.issued | 1993-01-01 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/85095 | - |
dc.relation.isPartOf | 반도체 부품 합동학술발표회 | - |
dc.relation.isPartOf | 반도체 부품 합동학술발표회 논문집 | - |
dc.title | SIMOX SOI 제조시 산소이온 주입량의 감소가능성 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 반도체 부품 합동학술발표회, pp.165-168 | - |
dc.citation.startPage | 165-168 | - |
dc.citation.title | 반도체 부품 합동학술발표회 | - |
dc.contributor.affiliatedAuthor | 김범만 | - |
dc.description.journalClass | 2 | - |
dc.description.journalClass | 2 | - |
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