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Hf-based Thin Films on Si and Ge Substrate by Plasma-Enhanced Atomic Layer Deposition
- Title
- Hf-based Thin Films on Si and Ge Substrate by Plasma-Enhanced Atomic Layer Deposition
- Authors
- 김형준
- Publisher
- ICMAT
- Article Type
- Conference
- Citation
- 1st International Conference on Microelectronics and Plasma Technology
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg