Full metadata record
DC Field | Value | Language |
dc.contributor.author | 김형준 | - |
dc.date.accessioned | 2018-06-21T15:05:25Z | - |
dc.date.available | 2018-06-21T15:05:25Z | - |
dc.date.created | 2009-03-27 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/83926 | - |
dc.publisher | ICMAT | - |
dc.relation.isPartOf | 1st International Conference on Microelectronics and Plasma Technology | - |
dc.relation.isPartOf | 1st International Conference on Microelectronics and Plasma Technology | - |
dc.title | Hf-based Thin Films on Si and Ge Substrate by Plasma-Enhanced Atomic Layer Deposition | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 1st International Conference on Microelectronics and Plasma Technology | - |
dc.citation.conferenceDate | 2008-08-01 | - |
dc.citation.conferencePlace | KO | - |
dc.citation.title | 1st International Conference on Microelectronics and Plasma Technology | - |
dc.contributor.affiliatedAuthor | 김형준 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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