Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Electrical properties improvements in high k dielectric by in situ nitridation during atomic layer deposition
- Title
- Electrical properties improvements in high k dielectric by in situ nitridation during atomic layer deposition
- Authors
- 김형준
- Publisher
- 제주
- Article Type
- Conference
- Citation
- The 14th Korean Conference on Semiconductors
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg