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High-resolution 2-D strain analysis of SiGe/Si epitaxial layer systems
- Title
- High-resolution 2-D strain analysis of SiGe/Si epitaxial layer systems
- Date Issued
- 2014-11-16
- Publisher
- 대한금속재료학회
- Article Type
- Conference
- Citation
- International Conference on Electronic Materials and Nanotechnology for Green Environment 2014, 2014-11-16
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Related Researcher
- 오상호OH, SANG HO
- Dept of Materials Science & Enginrg