Effects of Impurity Controlled Mo Under-layer on Reliability of Cu interconnector for TFT-LCD
- Title
- Effects of Impurity Controlled Mo Under-layer on Reliability of Cu interconnector for TFT-LCD
- Authors
- 박찬경; 구길호
- Date Issued
- 2009-11-30
- Publisher
- MRS fall meeting
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/43909
- Article Type
- Conference
- Citation
- MRS fall meeting, 2009-11-30
- Files in This Item:
- There are no files associated with this item.
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