SELF-ALIGNED HIGH-QUALITY TOTAL INTERNAL-REFLECTION MIRRORS
SCIE
SCOPUS
- Title
- SELF-ALIGNED HIGH-QUALITY TOTAL INTERNAL-REFLECTION MIRRORS
- Authors
- HAN, H; FORBES, DV; COLEMAN, JJ
- Date Issued
- 1995-08
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGI
- Abstract
- High-quality total internal reflection (TIR) mirrors are fabricated by a new self-aligned etch process,using SiCl, reactive ion etching (RIE), The self-aligned etch process requires only a single SiO2 mask layer without additional dielectric depositions and lift-off steps. The reflectivity of the TIR mirrors are measured by characterizing InGaAs-GaAs-AlGaAs strained-layer quantum-well heterostructure crank lasers that consist of crank-shaped ridge waveguides with two TIR mirrors and two cleaved facets, It is found that the self-aligned TIR mirrors have a very high reflectivity of 0.90 (0.46 dB/90 degrees loss).
- Keywords
- QUANTUM-WELL LASERS; HETEROSTRUCTURE LASERS; INTEGRATED-CIRCUITS; GUIDE STRUCTURE; CURRENT-DENSITY; BEAM-SPLITTER; GAIN-CURRENT; WAVE-GUIDES
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/28465
- DOI
- 10.1109/68.404008
- ISSN
- 1041-1135
- Article Type
- Article
- Citation
- IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 7, no. 8, page. 899 - 901, 1995-08
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