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3-D Observation of Dopant Distribution at NAND Flash Memory Floating Gate Using Atom Probe Tomography

Title
3-D Observation of Dopant Distribution at NAND Flash Memory Floating Gate Using Atom Probe Tomography
Authors
Lee, JHChae, BKKim, JJLee, SYPark, CG
POSTECH Authors
Park, CG
Date Issued
Jan-2015
Publisher
KOREAN INST METALS MATERIALS
URI
http://oasis.postech.ac.kr/handle/2014.oak/27084
DOI
10.1007/S13391-014-4194-3
ISSN
1738-8090
Article Type
Article
Citation
ELECTRONIC MATERIALS LETTERS, vol. 11, no. 1, page. 60 - 64, 2015-01
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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