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Nanolayer patterning based on surface modification with extreme ultraviolet light

Title
Nanolayer patterning based on surface modification with extreme ultraviolet light
Authors
Moon, SJeon, CHwang, HNHwang, CCSong, HShin, HJChung, SMPark, CY
POSTECH Authors
Chung, SM
Date Issued
2007-01
Publisher
WILEY-V C H VERLAG GMBH
Keywords
MOLECULAR NANOSTRUCTURES; LITHOGRAPHY; GROWTH
URI
https://oasis.postech.ac.kr/handle/2014.oak/23359
DOI
10.1002/ADMA.2006021
ISSN
0935-9648
Article Type
Article
Citation
ADVANCED MATERIALS, vol. 19, no. 10, page. 1321 - 1324, 2007-01
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