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Cited 87 time in webofscience Cited 90 time in scopus
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Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition

Title
Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition
Authors
Kim, WHPark, SJSon, JYKim, H
POSTECH Authors
Kim, H
Date Issued
Jan-2008
Publisher
IOP PUBLISHING LTD
Keywords
RUTHENIUM THIN-FILMS; ARRAYS; LITHOGRAPHY; DIELECTRICS; ELECTRODES; NANOTUBES; TEMPLATE; SILICON; METAL
URI
http://oasis.postech.ac.kr/handle/2014.oak/22946
DOI
10.1088/0957-4484/19/04/045302
ISSN
0957-4484
Article Type
Article
Citation
NANOTECHNOLOGY, vol. 19, no. 4, 2008-01
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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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