Effect of surface treatment on leakage current of GaAs/AlGaAs laser microcavities
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SCOPUS
- Title
- Effect of surface treatment on leakage current of GaAs/AlGaAs laser microcavities
- Authors
- Kim, JY; Lee, J; Kim, J; Kang, BK; Kwon, O
- Date Issued
- 2003-06-23
- Publisher
- AMER INST PHYSICS
- Abstract
- The effect of surface treatment on leakage current is investigated for two structures of the electropumped GaAs/AlGaAs laser microcavities, one with mesa and the other with hyperboloid-drum structures. Using surface sheet resistivity as a figure-of-merit parameter, the results of different surface treatment methods are compared. The best result is obtained when the sample has been polished in a H2SO4:H2O2:H2O=1:8:1000 solution for 5 s, and treated subsequently in a 6% excess sulfur-containing (NH4)(2)S-x solution at 60 degreesC for 8 mins. The treatment in (NH4)(2)S-x solution increases the surface sheet resistivity by a factor of similar to14. The cross-sectional shape of the cavity and the vertical profile of distributed Bragg reflector mirrors have little correlation with the leakage current. (C) 2003 American Institute of Physics.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/18497
- DOI
- 10.1063/1.1584784
- ISSN
- 0003-6951
- Article Type
- Article
- Citation
- APPLIED PHYSICS LETTERS, vol. 82, no. 25, page. 4504 - 4506, 2003-06-23
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