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Optimization of Ge Mole Fraction in Sacrificial Layers for Sub-3-nm Node Silicon Nanosheet FETs
- Title
- Optimization of Ge Mole Fraction in Sacrificial Layers for Sub-3-nm Node Silicon Nanosheet FETs
- Authors
- BAEK, ROCK HYUN; SANGUK, LEE; JINSU, JEONG; 윤준식; LEE, JUNJONG; 임재완; 이승환
- Date Issued
- 2023-03-09
- Publisher
- IEEE Electron Devices Technology and Manufacturing (IEEE EDTM)
- Article Type
- Conference
- Citation
- The 7th Electron Devices Technology and Manufacturing Conference (IEEE EDTM 2023), 2023-03-09
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg