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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | BAEK, ROCK HYUN | - |
| dc.contributor.author | SANGUK, LEE | - |
| dc.contributor.author | JINSU, JEONG | - |
| dc.contributor.author | 윤준식 | - |
| dc.contributor.author | LEE, JUNJONG | - |
| dc.contributor.author | 임재완 | - |
| dc.contributor.author | 이승환 | - |
| dc.date.accessioned | 2024-01-23T00:31:44Z | - |
| dc.date.available | 2024-01-23T00:31:44Z | - |
| dc.date.created | 2023-12-19 | - |
| dc.date.issued | 2023-03-09 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/119854 | - |
| dc.language | English | - |
| dc.publisher | IEEE Electron Devices Technology and Manufacturing (IEEE EDTM) | - |
| dc.relation.isPartOf | The 7th Electron Devices Technology and Manufacturing Conference (IEEE EDTM 2023) | - |
| dc.title | Optimization of Ge Mole Fraction in Sacrificial Layers for Sub-3-nm Node Silicon Nanosheet FETs | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | The 7th Electron Devices Technology and Manufacturing Conference (IEEE EDTM 2023) | - |
| dc.citation.conferenceDate | 2023-03-07 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | The 7th Electron Devices Technology and Manufacturing Conference (IEEE EDTM 2023) | - |
| dc.contributor.affiliatedAuthor | BAEK, ROCK HYUN | - |
| dc.contributor.affiliatedAuthor | SANGUK, LEE | - |
| dc.contributor.affiliatedAuthor | JINSU, JEONG | - |
| dc.contributor.affiliatedAuthor | 윤준식 | - |
| dc.contributor.affiliatedAuthor | LEE, JUNJONG | - |
| dc.contributor.affiliatedAuthor | 임재완 | - |
| dc.contributor.affiliatedAuthor | 이승환 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg