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Preferred orientation of TiN films studied by a real time synchrotron x-ray scattering

Title
Preferred orientation of TiN films studied by a real time synchrotron x-ray scattering
Authors
Je, JHNoh, DYKim, HKLiang, KS
POSTECH Authors
Je, JH
Date Issued
Jan-1997
Publisher
AMER INST PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/10469
ISSN
0021-8979
Article Type
Article
Citation
JOURNAL OF APPLIED PHYSICS, vol. 81, no. 9, page. 6126 - 6133, 1997-01
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제정호JE, JUNG HO
Dept of Materials Science & Enginrg
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