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Showing results 1 to 5 of 5
Conference
Atomic Layer Deposition of TaC gate electrode with TBTDET

2009년도 한국재료학회 춘계학술발표대회 및 제16회 신소재 심포지엄

Conference
Atomic Layer Deposition of TaC gater electrode with TBTDET

2009년도 한국재료학회 춘계학술발표대회 및 제16회 신소재 심포지엄

Thesis
Atomic Layer Deposition of TiCxNy films for gate electrode application

Thesis(Doctor), 2014

Conference
Plasma enhanced atomic layer deposition of TaCxNy thin film with TBTDET and methane/hydrogen gas for NMOSFET gate electrode

10th International Conference on Atomic Layer Deposition, Seoul Education Culture Center, 2010-06-22

Conference
Plasma enhanced atomic layer deposition of TaCxNy thin film with TBTDET and methane/hydrogen gas for NMOSFET gate electrode

10th International Conference on Atomic Layer Deposition, 2010-06-22

1
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