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Atomic Layer Deposition of TaC gate electrode with TBTDET
- Title
- Atomic Layer Deposition of TaC gate electrode with TBTDET
- Publisher
- 한국재료학회
- Article Type
- Conference
- Citation
- 2009년도 한국재료학회 춘계학술발표대회 및 제16회 신소재 심포지엄
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