Atomic Layer Deposition of TaC gate electrode with TBTDET
- Title
- Atomic Layer Deposition of TaC gate electrode with TBTDET
- Authors
- 이시우; 조기희
- Publisher
- 한국재료학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/51541
- Article Type
- Conference
- Citation
- 2009년도 한국재료학회 춘계학술발표대회 및 제16회 신소재 심포지엄
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