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MICROELECTRONIC ENGINEERING, vol. 147, page. 134 - 136, 2015-11-01

ELECTRONIC MATERIALS LETTERS, vol. 9, no. 6, page. 747 - 750, 2013-11

MICRON, vol. 79, page. 101 - 109, 2015-12

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, vol. 40, no. 3A, page. 1188 - 1193, 2001-03

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 17, no. 3, page. 1034 - 1039, 1999-05

ADVANCED FUNCTIONAL MATERIALS, vol. 23, no. 30, page. 3747 - 3754, 2013-08-12

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 16, no. 5, page. 2725 - 2728, 1998-09

JOURNAL OF MATERIALS CHEMISTRY A, vol. 3, no. 47, page. 23725 - 23731, 2015-01

JOURNAL OF APPLIED PHYSICS, vol. 82, no. 11, page. 5460 - 5464, 1997-12-01

APPLIED PHYSICS LETTERS, vol. 73, no. 22, page. 3247 - 3249, 1998-11-30

Advanced Materials, vol. 28, no. 34, page. 7430 - 7435, 2016-09-14

JOURNAL OF APPLIED PHYSICS, vol. 84, no. 2, page. 911 - 917, 1998-07-15

APPLIED PHYSICS LETTERS, vol. 73, no. 12, page. 1670 - 1672, 1998-09-21

METALS AND MATERIALS INTERNATIONAL, vol. 22, no. 1, page. 34 - 40, 2016-01

Advanced Material, vol. 28, no. 28, page. 5916 - +, 2016-07-27

APPLIED PHYSICS LETTERS, vol. 71, no. 18, page. 2656 - 2658, 1997-11-03

MARINE BIOTECHNOLOGY, vol. 4, no. 1, page. 63 - 73, 2002-01

, 2009-01

MICRON, vol. 58, page. 32 - 37, 2014-03

PHYSICAL CHEMISTRY CHEMICAL PHYSICS, vol. 17, no. 33, page. 21555 - 21563, 2015-01