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KIM, HYUNGJUN(김형준)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2009
1
Type
Article
1
Subject
ATOMIC-LAYER DEPOSITION
1
CAPACITANCE
1
CMOS
1
Gate oxide
1
HfO(2)
1
HfO2
1
Interface roughness
1
Metal gate
1
Ru
1
TECHNOLOGY
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SCIE
1
SCOPUS
1
Applied search limites :
Author
: Shin, YH
Subject
: CMOS
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Article
Interface roughness effect between gate oxide and metal gate on dielectric property
SCIE
SCOPUS
THIN SOLID FILMS, vol. 517, no. 14, page. 3892 - 3895, 2009-05-29
Son, JY
;
Maeng, WJ
;
Kim, WH
;
Shin, YH
;
Kim, H
1
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