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KIM, HYUNGJUN(김형준)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2006
1
Type
Article
1
Subject
ATOMIC LAYER DEPOSITION
1
CHEMICAL-VAPOR-DEPOSITION
1
CHEMISTRY
1
DIELECTRIC-CONSTANT
1
GROWTH
1
METAL
1
TANTALUM OXIDE
1
TICL4
1
ULTRATHIN TA2O5 FILMS
1
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SCIE
1
SCOPUS
1
Applied search limites :
Subject
: CHEMISTRY
Subject
: METAL
Journal Registered
: scopus
Journal Registered
: scopus
Subject
: DIELECTRIC-CONSTANT
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Article
Thermal and plasma-enhanced ALD of Ta and Ti oxide thin films from alkylamide precursors
SCIE
SCOPUS
ELECTROCHEMICAL AND SOLID STATE LETTERS, vol. 9, no. 6, page. G191 - G194, 2006-01
Maeng, WJ
;
Kim, H
1
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