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CHUNG, YOONYOUNG(정윤영)
scopus
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Dept of Electrical Engineering(전자전기공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2020
1
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Article
1
Subject
AL2O3
1
ATOMIC LAYER DEPOSITION
1
Dielectric
1
Hydrogen plasma
1
INTERFACE
1
Interface traps
1
Low temperature
1
OXIDATION
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SI
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SIO2-FILMS
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Article
Low-Temperature Fabrication (≤150 °C) of High-Quality Sputtered Silicon Oxide Thin Film with Hydrogen Plasma Treatment
SCIE
SCOPUS
Acs Applied Electronic Materials, vol. 2, no. 10, page. 3320 - 3326, 2020-10-27
Seo
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Park
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Jeon
;
Yun
;
Park
;
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