X-ray-induced Cu deposition and patterning on insulators at room temperature
SCIE
SCOPUS
- Title
- X-ray-induced Cu deposition and patterning on insulators at room temperature
- Authors
- Hsu, Pei-Cheng; Chen, Yu-Sheng; Hwu, Yeukuang; Je, J. H.; Margaritondo, G.; Tok, Eng Soon
- Date Issued
- 2015-11
- Publisher
- INT UNION CRYSTALLOGRAPHY
- Abstract
- X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/96324
- DOI
- 10.1107/S1600577515015234
- ISSN
- 1600-5775
- Article Type
- Article
- Citation
- JOURNAL OF SYNCHROTRON RADIATION, vol. 22, page. 1524 - 1527, 2015-11
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- There are no files associated with this item.
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