Solid-phase epitaxy of amorphous Si using single-crystalline Si nanowire seed templates
SCIE
SCOPUS
- Title
- Solid-phase epitaxy of amorphous Si using single-crystalline Si nanowire seed templates
- Authors
- Woo, YS; Kang, K; Jo, MH; Jeon, JM; Kim, M
- Date Issued
- 2007-11-26
- Publisher
- AMER INST PHYSICS
- Abstract
- We report solid-phase epitaxy of amorphous Si (a-Si) shells using crystalline Si (c-Si) nanowire cores as seed templates. The c-Si core/a-Si shell nanowire heterostructures were in situ synthesized via a two-step chemical vapor deposition: the Au-catalytic decomposition of SiH4 for the core c-Si nanowires and the subsequent homogeneous decomposition of SiH4 at higher temperatures for the a-Si shells. Upon thermal annealing above 600 degrees C, the a-Si shells crystallize into c-Si shells from c-Si core nanowires in an epitaxial fashion. We discuss the crystallization kinetics of a-Si shells within the frame of Gibbs-Thomson effects arising from the finite size of nanowire seeds.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/9572
- DOI
- 10.1063/1.2817601
- ISSN
- 0003-6951
- Article Type
- Article
- Citation
- APPLIED PHYSICS LETTERS, vol. 91, no. 22, 2007-11-26
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