INSTANT CURVATURE MEASUREMENT FOR MICROCANTILEVER SENSORS
SCIE
SCOPUS
- Title
- INSTANT CURVATURE MEASUREMENT FOR MICROCANTILEVER SENSORS
- Authors
- Jeon, S; Thundat, T
- Date Issued
- 2004-08-09
- Publisher
- AMER INST PHYSICS
- Abstract
- A multiple-point deflection technique has been developed for the instant measurement of microcantilever curvature. Eight light-emitting diodes are focused on various positions of a gold-coated silicon cantilever through optical fibers, and temperature change or chemical adsorption induces cantilever bending. The deflection at each point on the cantilever is measured with subnanometer precision by a position-sensitive detector, and thus the curvature of the cantilever is obtained. (C) 2004 American Institute of Physics.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/9462
- DOI
- 10.1063/1.1781389
- ISSN
- 0003-6951
- Article Type
- Article
- Citation
- APPLIED PHYSICS LETTERS, vol. 85, no. 6, page. 1083 - 1084, 2004-08-09
- Files in This Item:
-
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.