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A Study on the atomic layer deposited Tantalum carbo nitride films using TBTDET and hydrogen
- Title
- A Study on the atomic layer deposited Tantalum carbo nitride films using TBTDET and hydrogen
- Authors
- 이시우
- Publisher
- 한국진공학회
- Article Type
- Conference
- Citation
- 제 35회 한국진공학회 하계 정기학술대회
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