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Growth of Hafnium Aluminate Thin Films by Direct Liquid Injection Metal Organic Vapor Deposition Using Hf(N(C2H5)4 and Al(OiC3H7)3
- Title
- Growth of Hafnium Aluminate Thin Films by Direct Liquid Injection Metal Organic Vapor Deposition Using Hf(N(C2H5)4 and Al(OiC3H7)3
- Authors
- 이시우
- Publisher
- 반도체 학술대회
- Article Type
- Conference
- Citation
- 제11회 반도체 학술대회, page. 333
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