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FT-IR diagnosis of the gas phase reaction for the deposition of tantalum carbo-nitride film using TBTDET
- Title
- FT-IR diagnosis of the gas phase reaction for the deposition of tantalum carbo-nitride film using TBTDET
- Authors
- 이시우
- Publisher
- 한국표준과학연구원
- Article Type
- Conference
- Citation
- 제 2회 반도체공정 진단 Workshop, page. 119
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