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X-ray imaging and TEM study of micropipes related to their propagation through porous SiC layer/SiC epilayer interface

Title
X-ray imaging and TEM study of micropipes related to their propagation through porous SiC layer/SiC epilayer interface
Authors
제정호
URI
https://oasis.postech.ac.kr/handle/2014.oak/90461
Article Type
Conference
Citation
10th International Conference on Silicon Carbide and Related Materials 2003
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제정호JE, JUNG HO
Dept of Materials Science & Enginrg
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