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TaCxNy 박막의 원자층 화학 증착 공정과 박막 특성 연구
- Title
- TaCxNy 박막의 원자층 화학 증착 공정과 박막 특성 연구
- Authors
- 송문균
- Date Issued
- 2009
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001909647
https://oasis.postech.ac.kr/handle/2014.oak/8890
- Article Type
- Thesis
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