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Comb actuator의 전기적 강성과 quality factor에 관한 연구
- Title
- Comb actuator의 전기적 강성과 quality factor에 관한 연구
- Authors
- 강명환
- Date Issued
- 2009
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001909555
https://oasis.postech.ac.kr/handle/2014.oak/8798
- Article Type
- Thesis
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