Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Characterization of nanoporous low-dielectric constant SiCOH films using organosilane precursors
- Title
- Characterization of nanoporous low-dielectric constant SiCOH films using organosilane precursors
- Authors
- 이문호
- Publisher
- Pohang Accelerator Laboratory
- Article Type
- Conference
- Citation
- The 18th Synchrotron Radiation Users’ Workshop & KOSUA Meeting
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry