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In-situ GISAXS study on the porous low-k thin films
- Title
- In-situ GISAXS study on the porous low-k thin films
- Authors
- 이문호
- Publisher
- Korean Polymer Society
- Article Type
- Conference
- Citation
- Korean Polymer Society Fall Meeting
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry