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Sol-Gel법을 이용한 DRAM용 BST박막의 제조와 전기적 특성

Title
Sol-Gel법을 이용한 DRAM용 BST박막의 제조와 전기적 특성
Authors
장현명
Date Issued
1997-11-01
Publisher
교육부 신소재 연구사업
URI
https://oasis.postech.ac.kr/handle/2014.oak/84603
Article Type
Conference
Citation
제 10회 교육부 신소재 연구사업 학술발표, page. 325 - 330, 1997-11-01
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장현명JANG, HYUN MYUNG
Div of Advanced Materials Science
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