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Block copolymer micelles로 형성된 나노패턴의 ICP(Inductively Coupled Plasma)에칭 및 SiO2 nanorod 형성에 관한 연구
- Title
- Block copolymer micelles로 형성된 나노패턴의 ICP(Inductively Coupled Plasma)에칭 및 SiO2 nanorod 형성에 관한 연구
- Authors
- 이종람
- Publisher
- 한국 반도체 학술대회
- Article Type
- Conference
- Citation
- 제10회 한국반도체 학술대회, page. 653 - 654
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Related Researcher
- 이종람LEE, JONG LAM
- Dept of Materials Science & Enginrg