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Atomic Layer Deposition for Nanoscale Contact Application
- Title
- Atomic Layer Deposition for Nanoscale Contact Application
- Authors
- 김형준
- Publisher
- VMIC conference proceeding
- Article Type
- Conference
- Citation
- VMIC conference proceeding, page. 309
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg