Comparative study of ALD Ta2O5 and TaOxNy
- Title
- Comparative study of ALD Ta2O5 and TaOxNy
- Authors
- 김형준
- Publisher
- JJAP
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/83738
- Article Type
- Conference
- Citation
- International workshop of dielectric technology and future ULSI devices 2006
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.