A LEED study of silicon nitride layer generated by low energy (10-100 eV) nitrigen ion beams
- Title
- A LEED study of silicon nitride layer generated by low energy (10-100 eV) nitrigen ion beams
- Authors
- 정진욱
- Date Issued
- 1992-10-01
- Publisher
- 한국물리학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/83518
- Article Type
- Conference
- Citation
- 한국물리학회, page. 381, 1992-10-01
- Files in This Item:
- There are no files associated with this item.
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