An EELS study of slow-ion deposited silicon nitride films on the Si(001) surface
- Title
- An EELS study of slow-ion deposited silicon nitride films on the Si(001) surface
- Authors
- 정진욱
- Date Issued
- 1992-10-01
- Publisher
- 한국물리학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/83517
- Article Type
- Conference
- Citation
- 한국물리학회, page. 310, 1992-10-01
- Files in This Item:
- There are no files associated with this item.
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