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An EELS study of slow-ion deposited silicon nitride films on the Si(001) surface

Title
An EELS study of slow-ion deposited silicon nitride films on the Si(001) surface
Authors
정진욱
Date Issued
1992-10-01
Publisher
한국물리학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/83517
Article Type
Conference
Citation
한국물리학회, page. 310, 1992-10-01
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