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Tetrakis-diethylamido Titanium (TDEAT)과 Tetrabutoxyorthosilane(TBOS)을 이용한 Ti-silicate 박막의 원자층화학증착 및 특성분석
- Title
- Tetrakis-diethylamido Titanium (TDEAT)과 Tetrabutoxyorthosilane(TBOS)을 이용한 Ti-silicate 박막의 원자층화학증착 및 특성분석
- Authors
- 이승재
- Date Issued
- 2007
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001908070
https://oasis.postech.ac.kr/handle/2014.oak/8287
- Article Type
- Thesis
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