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A Study of Super-low-dielectric Organosilicate Films with the Controlled Nanoporous Structures Using Synchrotron X-ray Reflectivity
- Title
- A Study of Super-low-dielectric Organosilicate Films with the Controlled Nanoporous Structures Using Synchrotron X-ray Reflectivity
- Authors
- 이문호
- Date Issued
- 2002-08-01
- Article Type
- Conference
- Citation
- 2nd International Symposium of X-ray and Neutron Scattering & 3rd CIMS International Symposium, page. 99 - 99, 2002-08-01
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry