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A Study of Super-low-dielectric Organosilicate Films with the Controlled Nanoporous Structures Using Synchrotron X-ray Reflectivity

Title
A Study of Super-low-dielectric Organosilicate Films with the Controlled Nanoporous Structures Using Synchrotron X-ray Reflectivity
Authors
이문호
POSTECH Authors
이문호
Date Issued
1-Aug-2002
URI
http://oasis.postech.ac.kr/handle/2014.oak/82144
Article Type
Conference
Citation
2nd International Symposium of X-ray and Neutron Scattering & 3rd CIMS International Symposium, page. 99 - 99, 2002-08-01
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이문호REE, MOONHOR
Dept of Chemistry
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