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Hydrogen effects of heterostructured CMOS TFT in low temperature RTCVD thin films

Title
Hydrogen effects of heterostructured CMOS TFT in low temperature RTCVD thin films
Authors
강봉구
Date Issued
1996-09-01
URI
https://oasis.postech.ac.kr/handle/2014.oak/81936
Article Type
Conference
Citation
Electrochem. Soc. Proc., page. 358, 1996-09-01
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강봉구KANG, BONG KOO
Dept of Electrical Enginrg
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