Dual-Frequency Capacitively Coupled Discharges: Theories and Modelings
- Title
- Dual-Frequency Capacitively Coupled Discharges: Theories and Modelings
- Authors
- 이재구
- Date Issued
- 2004-06-11
- Publisher
- Fukuoka,Japan
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/81082
- Article Type
- Conference
- Citation
- 7th Asia Pacific Conference on Plasma Science and Technology(APCPST), page. 59, 2004-06-11
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- There are no files associated with this item.
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