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Hexafluoroacetylacetonate Copper(I) Allyltrimethylsilane을 이용한 초고집적 회로용 구리박막의 유기금속 화학증착
- Title
- Hexafluoroacetylacetonate Copper(I) Allyltrimethylsilane을 이용한 초고집적 회로용 구리박막의 유기금속 화학증착
- Authors
- 이시우
- Date Issued
- 1997-01-01
- Publisher
- 한국화학공학회
- Article Type
- Conference
- Citation
- 화학공학의 이론과 응용, page. 3121, 1997-01-01
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