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Selective wet etching of a GaAs/AlxGa1-xAs heterostructure with citric acid-hydrogen peroxide solution
- Title
- Selective wet etching of a GaAs/AlxGa1-xAs heterostructure with citric acid-hydrogen peroxide solution
- Authors
- 이종람
- Date Issued
- 1997-01-01
- Publisher
- 한국진공학회
- Article Type
- Conference
- Citation
- 제 12회 학술발표회, page. 21 - 22, 1997-01-01
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Related Researcher
- 이종람LEE, JONG LAM
- Dept of Materials Science & Enginrg