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A New Bulk-Micromachining Process using Deep RIE and Wet Etching
- Title
- A New Bulk-Micromachining Process using Deep RIE and Wet Etching
- Authors
- 임근배
- Date Issued
- 1997-11-19
- Publisher
- The Institute of Electrical Engineers
- Article Type
- Conference
- Citation
- Proceeding of The Institute of Electrical Engineers of Japan, page. 59 - 62, 1997-11-19
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