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Determination of the effective image blurring parameter in the SR proximity x-ray lithography simulation
- Title
- Determination of the effective image blurring parameter in the SR proximity x-ray lithography simulation
- Authors
- 김오현
- Date Issued
- 1999-11-01
- Article Type
- Conference
- Citation
- Extended Abstract of XEL '99, 1999-11-01
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Related Researcher
- 김오현KIM, OHYUN
- Dept of Electrical Enginrg