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Dose and shape modification proximity effect correction for forward-scattering range scale features in electron beam lithography
- Title
- Dose and shape modification proximity effect correction for forward-scattering range scale features in electron beam lithography
- Authors
- 김오현
- Date Issued
- 2000-07-01
- Publisher
- XEL
- Article Type
- Conference
- Citation
- MNC 2000, 2000-07-01
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Related Researcher
- 김오현KIM, OHYUN
- Dept of Electrical Enginrg